Nanoscale bilayer mechanical lithography using water as developer
Sustainability has become a critical concern in the semiconductor industry as hazardous wastes released during the manufacturing process of semiconductor devices have an adverse impact on human beings and the environment. The use of hazardous solvents in existing fabrication processes also restricts the use of polymer substrates because of their low chemical resistance to such solvents. Here, we demonstrate an environmentally friendly mechanical, bilayer lithography that uses just water for d...Expand abstract
- Publication status:
- Peer review status:
- Peer reviewed
- Copyright holder:
- Y Shu et al.
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- © 2021 The Authors. Published by American Chemical Society. This paper is open access via Creative Commons licensing.
- CC Attribution (CC BY)
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