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A convenient method for X-ray analysis in TEM that measures mass thickness and composition

Abstract:

We consider a new approach for quantitative analysis in transmission electron microscopy (TEM) that offers the same convenience as single-standard quantitative analysis in scanning electron microscopy (SEM). Instead of a bulk standard, a thin film with known mass thickness is used as a reference. The procedure involves recording an X-ray spectrum from the reference film for each session of acquisitions on real specimens. There is no need to measure the beam current; the current only needs to ...

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Publication status:
Published
Peer review status:
Peer reviewed

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Publisher copy:
10.1088/1757-899x/304/1/012017

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Institution:
University of Oxford
Division:
MPLS
Department:
Materials
Oxford college:
St Edmund Hall
Role:
Author
Publisher:
IOP Publishing Publisher's website
Journal:
IOP Conference Series: Materials Science and Engineering Journal website
Volume:
304
Issue:
1
Article number:
012017
Host title:
IOP Conference Series: Materials Science and Engineering
Publication date:
2018-01-25
Acceptance date:
2018-01-12
DOI:
EISSN:
1757-899X
ISSN:
1757-8981
Source identifiers:
827504
Keywords:
Pubs id:
pubs:827504
UUID:
uuid:4650c732-996a-407b-8540-12ddfc4af24f
Local pid:
pubs:827504
Deposit date:
2019-06-17

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