Conference item
A convenient method for X-ray analysis in TEM that measures mass thickness and composition
- Abstract:
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We consider a new approach for quantitative analysis in transmission electron microscopy (TEM) that offers the same convenience as single-standard quantitative analysis in scanning electron microscopy (SEM). Instead of a bulk standard, a thin film with known mass thickness is used as a reference. The procedure involves recording an X-ray spectrum from the reference film for each session of acquisitions on real specimens. There is no need to measure the beam current; the current only needs to ...
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- Publication status:
- Published
- Peer review status:
- Peer reviewed
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- Files:
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(Version of record, pdf, 1.8MB)
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- Publisher copy:
- 10.1088/1757-899x/304/1/012017
Authors
Bibliographic Details
- Publisher:
- IOP Publishing Publisher's website
- Journal:
- IOP Conference Series: Materials Science and Engineering Journal website
- Volume:
- 304
- Issue:
- 1
- Article number:
- 012017
- Host title:
- IOP Conference Series: Materials Science and Engineering
- Publication date:
- 2018-01-25
- Acceptance date:
- 2018-01-12
- DOI:
- EISSN:
-
1757-899X
- ISSN:
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1757-8981
- Source identifiers:
-
827504
Item Description
- Keywords:
- Pubs id:
-
pubs:827504
- UUID:
-
uuid:4650c732-996a-407b-8540-12ddfc4af24f
- Local pid:
- pubs:827504
- Deposit date:
- 2019-06-17
Terms of use
- Copyright holder:
- Statham et al
- Copyright date:
- 2018
- Notes:
- © P Statham et al 2018. Published under licence by IOP Publishing Ltd. Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. This paper was presented at the 15th European Workshop on Modern Developments and Applications in Microbeam Analysis and IUMAS-7 Meeting - 7th Meeting of the International union of Microbeam Analysis Societies, 7–11 May 2017, Konstanz, Germany.
- Licence:
- CC Attribution (CC BY)
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