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A study of amorphous transition metal oxide films

Abstract:

We present an experimentally guided study of film layer structure and opto-electronic properties of transition metal oxide (TMO) films. The oxide material system studied comprised the metals silicon (Si), zinc (Zn), and indium (In). The films were deposited via radio frequency magnetron sputtering (RFMS) on room-temperature Corning Eagle XG Glass (CEXG) substrates. Distinct (bi-layer (BL) vs single-layer (SL)) layer structures manifest as a function of angular distribution or pressure dist...

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Institution:
University of Oxford
Division:
MPLS
Department:
Chemistry
Sub department:
Inorganic Chemistry
Research group:
Prof. Peter P. Edwards FRS ML
Oxford college:
Oriel College
Role:
Author

Contributors

Institution:
University of Oxford
Division:
MPLS
Department:
Chemistry
Sub department:
Inorganic Chemistry
Research group:
Prof. Peter P. Edwards FRS ML
Oxford college:
St Catherine's College
Role:
Supervisor
Institution:
University of Oxford
Division:
MPLS
Department:
Materials
Research group:
Prof. Peter Bruce FRS FRSE FRSC
Oxford college:
St Edmund Hall
Role:
Supervisor
Institution:
University College London
Research group:
Prof. Sir Michael Pepper FRS FREng
Role:
Supervisor
Institution:
Cardiff University
Research group:
Prof. Adrian Porch
Role:
Examiner
Institution:
University of Oxford
Division:
MPLS
Department:
Chemistry
Sub department:
Inorganic Chemistry
Research group:
Prof. Andrew Goodwin
Oxford college:
St Anne's College
Role:
Examiner
Type of award:
DPhil
Level of award:
Doctoral
Awarding institution:
University of Oxford
Language:
English
Keywords:
Subjects:
Deposit date:
2021-11-25

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